橢偏儀在位表征電化學沉積的係統搭建（十六）- 可行性分析

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（十六）- 可行性分析

3.2.4可行性分析

(1)光路可行性分析

如圖3-4所示，為(wei) 了保證對電極不影響光路的傳(chuan) 輸，其可活動的範圍為(wei) 圖中h所示。如果半圓直徑為(wei) 50px，對電極寬25px，上限由電極碰到池體(ti) 壁決(jue) 定，則此時入射光的極限入射角為(wei) ɵ₁=30°；下限由入射光的入射角決(jue) 定，圖中的入射角ɵ₂=55°，則電極可調的極限zui低位置如圖所示。所以在滿足對電極不擋光的情況下，入射光的入射角可調範圍是30°<ɵ<90°。我們(men) 的工對電極選25px×25px，觀察窗口直徑為(wei) 75px，所以實際上我們(men) 可以調節的入射角度範圍更大，且而常用的入射角度為(wei) 55°到80°，所以這樣設計的觀察窗口和電極放置可以滿足要求。

圖3-4觀察窗口光路截麵分析圖

用鍍金矽片和電解液(透明溶液)在玻璃皿中調節了準直，不經過玻璃皿，溶液中鍍金矽片可以很好的反光；後又把玻璃皿的蓋子蓋上，驗證得知，在垂直於(yu) 玻璃蓋、空氣、溶液界麵入射時，光斑可以很好的打到電極片上，基本不受光路影響，斜射時光斑就散了。經過實際驗證，該池體(ti) 設計方案可行。

關(guan) 於(yu) 調節光斑使其達到圓心，這也可以實現的，因為(wei) 一旦不是垂直於(yu) 池體(ti) 入射，光斑就是分散的。

(2)電極的選擇

如圖3-5，用Comsol對如圖放置的長正方形電極和圓電極進行了陽極電流密度的模擬結果如圖3-6示。

圖3-5電極電流密度模擬圖

從(cong) 圖3-6中可以看出邊緣效應隨著電極的增大而減小，考慮到電解池尺寸，則選則25px×25px的電極片是比較合適的。從(cong) c、d對比可知，圓盤電極的邊緣化效應比長方形電極邊緣化效應更嚴(yan) 重，所以選片電極更合適。

圖3-6不同尺寸電極無量綱電流密度模擬圖(a)6.25px×6.25px；(b)12.5px×12.5px；(c)25px×25px；(d)半徑為(wei) 12.5px的圓盤電極

3.2.5池體(ti) 製作

現已經完成了製作，如圖3-7所示。池體(ti) 兩(liang) 端的長方體(ti) 及電極載體(ti) 是亞(ya) 克力板製作，中間的半圓柱體(ti) 由石英玻璃製作，以上部件定製完成，後期拚接自主完成。

圖3-7電解池實物圖

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