橢偏儀在位表征電化學沉積的係統搭建（二）-在位監控原理

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（二）-在位監控原理

1.橢偏儀(yi) 的在位監控

半導體(ti) 工藝比如cmos的製作過程，會(hui) 涉及到結構或者厚度的監控。例如在光刻前後，或者沉積與(yu) 腐蝕過程，需要控製薄膜的厚度。而橢偏譜可以快速且無損傷(shang) 進行測量，並且其測試精度可以達到原子級別，因此廣泛国产成人在线观看免费网站於(yu) 半導體(ti) 製備工藝的在位監控中。比如，典型的32nmCMOS製做過程中大概會(hui) 需要100次厚度的測試控製，而其中就有80次厚度測試需要利用橢偏譜對其厚度進行監控。通常要解構薄膜的厚度，會(hui) 涉及到有效介質模型近似和Drude+Lorentz Oscillator模型的使用。利用橢偏儀(yi) 不僅(jin) 可以得到厚度信息，還可以得到薄膜的光學性質等信息，從(cong) 而獲取材料的生長性能。下麵先介紹橢偏儀(yi) 的基本原理。

1.2在位監控原理

橢圓偏振法在位監控是指在材料生長或表麵吸附過程中進行在位測量。標準的橢圓偏振裝置可以實現樣品的實時監測和控製過程。在位監控原理如1-2所示，在位測試的搭建過程中，需要注意測試裝置、橢偏儀(yi) 的匹配。監測窗口要位於(yu) 測試沉積基底較遠的地方，以避免沉積在窗口上。此外，監測窗口會(hui) 影響光的偏振狀態，因此必須對其進行表征。

圖1-2利用橢偏儀(yi) 測量的示意圖

反射橢偏儀(yi) 是研究薄膜生長和表麵吸附的一種有力工具。在位橢偏譜測量中，国产成人在线观看免费网站zui廣泛的儀(yi) 器是旋轉偏振片橢偏儀(yi) 。在旋轉偏振片橢偏儀(yi) 中，儀(yi) 器的起偏器或檢偏器(RPE)、分析儀(yi) (RAE)或補償(chang) 器(RCE)隨時間連續旋轉。另外一種相位調製橢偏儀(yi) (PME)，沒有活動部件因此測試較快但是也較昂貴。在位光譜橢偏測量的數據采集方式決(jue) 定了測量間隔和測量精度。光電二極管陣列可以在積分模式下進行完全並行的數據采集，而後續的相位調製橢圓儀(yi) 采用串行數據采集。一個(ge) 旋轉偏振器多通道橢偏儀(yi) (RPE)允許在25ms時間采集64個(ge) 光譜位置(ψ，Δ)點。

綜上所述，當測試薄膜的表麵或厚度改變時，橢偏儀(yi) 測試得到的橢偏參數會(hui) 隨之改變。橢偏儀(yi) 在位監控是在進行物理或化學變化的同時對實驗樣品進行實時的橢偏儀(yi) 測試，從(cong) 而獲取實驗樣品實時的厚度、光學常數等物理特性。下麵是橢偏儀(yi) 在位監控的案例。

了解更多橢偏儀(yi) 詳情，請訪問上海昊量光電的官方網頁：

https://www.weilancj.com/three-level-56.html

更多詳情請聯係昊量光電/歡迎直接聯係昊量光電

關(guan) 於(yu) 昊量光電：

上海昊量光電設備有限国产黄色在线观看是光電国产欧美在线專(zhuan) 業(ye) 代理商，国产欧美在线包括各類激光器、光電調製器、光學測量設備、光學元件等，涉及国产成人在线观看免费网站涵蓋了材料加工、光通訊、生物醫療、科學研究、國防、量子光學、生物顯微、物聯傳(chuan) 感、激光製造等；可為(wei) 客戶提供完整的設備安裝，培訓，硬件開發，軟件開發，係統集成等服務。

您可以通過我們(men) 昊量光電的官方網站www.weilancj.com了解更多的国产欧美在线信息，或直接來電谘詢4006-888-532。

相關(guan) 文獻

[1] WONG H S P, FRANK D J, SOLOMON P M et al. Nanoscale CMOS[J]. Proceedings of the IEEE, 1999, 87(4): 537-570.

[2] LOSURDO M, HINGERL K. ellipsometry at the nanoscale[M]. Springer Heidelberg New York Dordrecht London. 2013.

[3] DYRE J C. Universal low-temperature ac conductivity of macroscopically disordered nonmetals[J]. Physical Review B, 1993, 48(17): 12511-12526. DOI:10.1103/PhysRevB.48.12511.

[4] CHEN S, KÜHNE P, STANISHEV V et al. On the anomalous optical conductivity dISPersion of electrically conducting polymers: Ultra-wide spectral range ellipsometry combined with a Drude-Lorentz model[J]. Journal of Materials Chemistry C, 2019, 7(15): 4350-4362.

[5] 陳籃，周岩. 膜厚度測量的橢偏儀(yi) 法原理分析[J]. 大學物理實驗, 1999, 12(3): 10-13.

[6] ZAPIEN J A, COLLINS R W, MESSIER R. Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV[J]. Review of Scientific Instruments, 2000, 71(9): 3451-3460.

[7] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[8] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[9] YUAN M, YUAN L, HU Z et al. In Situ Spectroscopic Ellipsometry for Thermochromic CsPbI3 Phase Evolution Portfolio[J]. Journal of Physical Chemistry C, 2020, 124(14): 8008-8014.

[10] 焦楊景.橢偏儀(yi) 在位表征電化學沉積的係統搭建.雲(yun) 南大學說是論文,2022.

[11] CANEPA M, MAIDECCHI G, TOCCAFONDI C et al. Spectroscopic ellipsometry of self assembLED monolayers: Interface effects. the case of phenyl selenide SAMs on gold[J]. Physical Chemistry Chemical Physics, 2013, 15(27): 11559-11565. DOI:10.1039/c3cp51304a.

[12] FUJIWARA H, KONDO M, MATSUDA A. Interface-layer formation in microcrystalline Si:H growth on ZnO substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Journal of Applied Physics, 2003, 93(5): 2400-2409.

[13] FUJIWARA H, TOYOSHIMA Y, KONDO M et al. Interface-layer formation mechanism in (formula presented) thin-film growth studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Physical Review B - Condensed Matter and Materials Physics, 1999, 60(19): 13598-13604.

[14] LEE W K, KO J S. Kinetic model for the simulation of hen egg white lysozyme adsorption at solid/water interface[J]. Korean Journal of Chemical Engineering, 2003, 20(3): 549-553.

[15] STAMATAKI K, PAPADAKIS V, EVEREST M A et al. Monitoring adsorption and sedimentation using evanescent-wave cavity ringdown ellipsometry[J]. Applied Optics, 2013, 52(5): 1086-1093.

[16] VIEGAS D, FERNANDES E, QUEIRÓS R et al. Adapting Bobbert-Vlieger model to spectroscopic ellipsometry of gold nanoparticles with bio-organic shells[J]. Biomedical Optics Express, 2017, 8(8): 3538.

[17] ARWIN H. Application of ellipsometry techniques to biological materials[J]. Thin Solid Films, 2011, 519(9): 2589-2592.

[18] ZIMMER A, VEYS-RENAUX D, BROCH L et al. In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy [J]. Journal of Vacuum Science & Technology B, 2019, 37(6): 062911.

[19] ZANGOOIE S, BJORKLUND R, ARWIN H. Water Interaction with Thermally Oxidized Porous Silicon Layers[J]. Journal of The Electrochemical Society, 1997, 144(11): 4027-4035.

[20] KYUNG Y B, LEE S, OH H et al. Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry[J]. Bulletin of the Korean Chemical Society, 2005, 26(6): 947-951.

[21] OGIEGLO W, VAN DER WERF H, TEMPELMAN K et al. Erratum to ― n-Hexane induced swelling of thin PDMS films under non-equilibrium nanofiltration permeation conditions, resolved by spectroscopic ellipsometry‖ [J. Membr. Sci. 431 (2013), 233-243][J]. Journal of Membrane Science, 2013, 437: 312..

[22] BROCH L, JOHANN L, STEIN N et al. Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments[J]. Review of Scientific Instruments, 2007, 78(6).

[23] BISIO F, PRATO M, BARBORINI E et al. Interaction of alkanethiols with nanoporous cluster-assembled Au films[J]. Langmuir, 2011, 27(13): 8371-8376.

[24] 李廣立. 氧化亞(ya) 銅薄膜的製備及其光電性能研究[D]. 西南交通大學, 2016.

[25] 董金礦. 氧化亞(ya) 銅薄膜的製備及其光催化性能的研究[D]. 安徽建築大學, 2014.

[26] 張楨. 氧化亞(ya) 銅薄膜的電化學製備及其光催化和光電性能的研究[D]. 上海交通大學材料科 學與(yu) 工程學院, 2013.

[27] DISSERTATION M. Cellulose Derivative and Lanthanide Complex Thin Film Cellulose Derivative and Lanthanide Complex Thin Film[J]. 2017.

[28] NIE J, YU X, HU D et al. Preparation and Properties of Cu2O/TiO2 heterojunction Nanocomposite for Rhodamine B Degradation under visible light[J]. ChemistrySelect, 2020, 5(27): 8118-8128.

[29] STRASSER P, GLIECH M, KUEHL S et al. Electrochemical processes on solid shaped nanoparticles with defined facets[J]. Chemical Society Reviews, 2018, 47(3): 715-735.

[30] XU Z, CHEN Y, ZHANG Z et al. Progress of research on underpotential deposition——I. Theory of underpotential deposition[J]. Wuli Huaxue Xuebao/ Acta Physico - Chimica Sinica, 2015, 31(7): 1219-1230.

[31] PANGAROV n. Thermodynamics of electrochemical phase formation and underpotential metal deposition[J]. Electrochimica Acta, 1983, 28(6): 763-775.

[32] KAYASTH S. ELECTRODEPOSITION STUDIES OF RARE EARTHS[J]. Methods in Geochemistry and Geophysics, 1972, 6(C): 5-13.

[33] KONDO T, TAKAKUSAGI S, UOSAKI K. Stability of underpotentially deposited Ag layers on a Au(1 1 1) surface studied by surface X-ray scattering[J]. Electrochemistry Communications, 2009, 11(4): 804-807.

[34] GASPAROTTO L H S, BORISENKO N, BOCCHI N et al. In situ STM investigation of the lithium underpotential deposition on Au(111) in the air- and water-stable ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide[J]. Physical Chemistry Chemical Physics, 2009, 11(47): 11140-11145.

[35] SARABIA F J, CLIMENT V, FELIU J M. Underpotential deposition of Nickel on platinum single crystal electrodes[J]. Journal of Electroanalytical Chemistry, 2018, 819(V): 391-400.

[36] BARD A J, FAULKNER L R, SWAIN E et al. Fundamentals and Applications[M]. John Wiley & Sons, Inc, 2001.

[37] SCHWEINER F, MAIN J, FELDMAIER M et al. Impact of the valence band structure of Cu2O on excitonic spectra[J]. Physical Review B, 2016, 93(19): 1-16.

 [38] XIONG L, HUANG S, YANG X et al. P-Type and n-type Cu2O semiconductor thin films: Controllable preparation by simple solvothermal method and photoelectrochemical properties[J]. Electrochimica Acta, 2011, 56(6): 2735-2739.

[39] KAZIMIERCZUK T, FRÖHLICH D, SCHEEL S et al. Giant Rydberg excitons in the copper oxide Cu2O[J]. Nature, 2014, 514(7522): 343-347.

[40] RAEBIGER H, LANY S, ZUNGER A. Origins of the p-type nature and cation deficiency in Cu2 O and related materials[J]. Physical Review B - Condensed Matter and Materials Physics, 2007, 76(4): 1-5.

[41] 舒雲(yun) . Cu2O薄膜的電化學製備及其光電化學性能的研究[D]. 雲(yun) 南大學物理與(yu) 天文學院，2019.