多波長橢偏儀/膜厚測量儀

Film-Sense多波長橢偏儀(yi)

上海昊量光電推出的多波長橢偏儀(yi) 采用長壽命的LED光源，可分別提供405nm、450nm、465nm、525nm、595nm、635nm、660nm、850nm、950nm六種不同波長，並使用無移動部件的橢偏儀(yi) ，緊湊的係統提供快速可靠的薄膜測量。

通過1秒的測量可以精確的測量0-5000nm的大多數透明薄膜的厚度。並可以獲得n和k等光學常量。

相比於(yu) 單波長橢偏儀(yi) ，多波長橢偏儀(yi) 可測定薄膜厚度，對於(yu) 透明薄膜測量厚度至少可達5μm，不存在厚度周期性問題；可確定樣品其它其它參數特性例如薄膜粗糙度、多層膜厚度等；對數據分析提供檢測依據，一個(ge) 良好的分析模型應該適用於(yu) 不同波長的數據；對於(yu) 薄的薄膜（<10nm）多波長橢偏儀(yi) 提供的數據信息量可以與(yu) 光譜橢偏儀(yi) 相媲美。

国产成人在线观看免费网站案例：

原位測量：

                          AUTFS-1 Mounted on Kurt Lesker ALD Chamber                                                              AUT FS-1 Mounted on AJA Sputter Chamber

選配件：

1、聚焦選項：將樣品上的光束縮小至0.8 x 1.9 mm 或0.3 x 0.7 mm

2、聚焦束檢驗選項

    3、自動Mapping係統

国产欧美在线特點：

•  多波長

• 橢偏檢測器中無移動部件

• 優(you) 異的測量精度（優(you) 於(yu) 0.001nm）

• 可原位測量

客戶感言：

“These FS-1 ellipsometers are one of the best upgrades to our atomic layer processing reactors, and have now become an integral part of all our experiments on ALD and ALE.”

 ——Dr. Sumit Agarwal - Colorado School of Mines 

“這些FS-1橢偏儀(yi) 是我們(men) 原子層處理反應堆的蕞佳升級之一，現在已經成為(wei) 我們(men) 所有ALD和ALE實驗的組成部分”

 ——Sumit Agarwal博士-科羅拉多礦業(ye) 學院

“The Film Sense FS-1 in situ ellipsometer has greatly facilitated data acquisition and understanding of the thin film deposition processes in our lab. The instrument was relatively easy to incorporate onto a vacuum chamber, and includes a user-friendly manual and tutorial to explain basic operation. With this tool, we are able to collect much more information during a deposition, including measurements between ALD half-cycles that are not feasible with ex situ techniques. These ellipsometers have become an integral part of our laboratory research, and we look forward to continuing to work with Film Sense in the future."

——Rachel Nye, PhD - student in Chemical Engineering     Parsons Research Group, North Carolina State University

“薄膜傳(chuan) 感FS-1原位橢偏儀(yi) 大大地促進了我們(men) 實驗室的數據采集和對薄膜沉積過程的理解。該儀(yi) 器相對容易合並到真空室，並包括一個(ge) 用戶友好的手冊(ce) 和教程來解釋基本操作。有了這個(ge) 工具，我們(men) 可以在沉積過程中收集更多的信息，包括在ALD半個(ge) 周期之間的測量，而這在原位技術中是不可實現的。這些橢圓計已經成為(wei) 我們(men) 實驗室研究不可或缺的一部分，我們(men) 期待著在未來繼續與(yu) Film Sense合作。”

 —— 瑞秋·奈，化學工程博士生  帕森斯研究小組，北卡羅萊納州立大學

“Overall performance, affordability and ease of use has made the FS-1 a workhorse for our ALD process as well as equipment development efforts.  The next generation FS-1EX provides a combination of higher beam intensity and wider spectral range improving both precision and accuracy.  For metallic thin films such as TiN, Pt and Ru, two additional IR wavelengths enhance the ability to monitor film thickness and resistivity in-situ during growth.  This enhanced performance helps us to streamline development efforts by effectively understanding the impact of different process conditions on film quality in real-time.”

——Bruce Rayner - Principal Scientist       Atomic Layer Deposition, Kurt J. Lesker Company

“FS-1的整體(ti) 性能、可承受性和易用性使其成為(wei) 我們(men) ALD工藝和設備開發的主力。下一代FS-1EX提供了更高的光束強度和更寬的光譜範圍的組合，提高了精度和精度。對於(yu) 金屬薄膜，如TiN, Pt和Ru，兩(liang) 個(ge) 額外的IR波長增強了在生長過程中監測薄膜厚度和電阻率的能力。通過實時有效地了解不同工藝條件對膠片質量的影響，這種增強的性能有助於(yu) 我們(men) 簡化開發工作。”

——Bruce Rayner - Kurt J. Lesker国产黄色在线观看原子層沉積首席科學家

"The FS-1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”

——Dr Ruy Sebastian Bonilla - Research Fellow     Oxford Materials Department

“FS-1是一款優(you) 良的基礎橢偏計。可靠，易於(yu) 使用，低維護，和巨大的價(jia) 值。“Film Sense”在幫助我們(men) 描述我們(men) 的薄膜和獲得精確的測量方麵做得很好。完全推薦。”

——Ruy Sebastian Bonilla博士-牛津大學材料係研究員

“We have purchased four Film Sense products for our small R&D group.  We have three FS-1 units and one FS-1EX unit with the RT300 mapping stage.  The Film Sense software is the most intuitive and easiest to use of all the ellipsometers I have experience using.  Our favorite feature is the multi-sample analysis method.   This feature allows you to determine the optical constants for new or poorly fitting films by simply measuring a small number of samples with various thicknesses.  Having knowledge of the actual thickness values is not even necessary.  The software understands the optical constants must be the same for all samples, and each sample varies only in thickness.  The user just needs to collect the data and press the fit button.  New films layers are created in just a couple of minutes.  We also love the automatic adjustment for sample height on the RT300 mapping stage.  Our process engineers are constantly adjusting the height on competitor’s units without this automatic feature.”

——Staff Systems Engineer at large semiconductor OEM

“我們(men) 已經為(wei) 我們(men) 的小研發團隊購買(mai) 了四款Film Sense国产欧美在线。我們(men) 有三個(ge) FS-1單元和一個(ge) FS-1EX單元與(yu) RT300繪圖階段。在我使用過的所有橢偏儀(yi) 中，Film Sense軟件是蕞直觀和蕞容易使用的。我們(men) 蕞喜歡的特征是多樣本分析方法。這個(ge) 特性允許您通過簡單地測量少量不同厚度的樣品來確定新的或不合適的薄膜的光學常數。甚至沒有必要了解實際厚度值。該軟件理解所有樣品的光學常數必須相同，並且每個(ge) 樣品隻在厚度上變化。用戶隻需要收集數據並按下適合按鈕。隻需幾分鍾就能創建出新的膠片層。我們(men) 也喜歡在RT300繪圖台上自動調整樣品高度。我們(men) 的工藝工程師一直在調整競爭(zheng) 對手国产欧美在线的高度，但沒有這種自動功能。”

——大型半導體(ti) OEM的係統工程師

"The Film Sense FS-1 is a powerful and reliable tool for in-situ characterization of ALD films. The real-time dynamic thickness measurements were critical to understanding the growth characteristics of multicomponent oxides, such as lead zirconate-titanate (PZT), which I studied for my dissertation research through the University of Maryland. The in-situ thickness data I collected with the FS-1 allowed me to screen precursors much more quickly than if I had to rely on ex-situ characterization methods. I continuously used the FS-1 for over five years and haven't experienced any downtime other than during occasional realignments when switching from ex-situ to in-situ measurement modes. The FS-1 would make a valuable addition to any laboratory looking to enhance their nondestructive thin-film thickness measurement capability."

——Nicholas A Strnad, Ph. D.

“Film Sense FS-1是一種強大而可靠的ALD薄膜原位表征工具。實時動態厚度測量對於(yu) 了解鋯鈦酸鉛(PZT)等多組分氧化物的生長特性至關(guan) 重要，這是我在馬裏蘭(lan) 大學進行論文研究時所研究的。與(yu) 非原位表征方法相比，我使用FS-1收集的原位厚度數據使我能夠更快地篩選前體(ti) 。我連續使用FS-1五年多了，除了從(cong) 原位測量模式切換到原位測量模式時偶爾進行重新調整外，沒有經曆過任何停機。FS-1將為(wei) 任何希望增強其無損薄膜厚度測量能力的實驗室提供有價(jia) 值的補充。”
——Nicholas A Strnad博士

"To summarize our nearly 5-year ownership experience of the FS-1 tool, all I can say, it’s most probably by far the highest performance/cost tool I have ever acquired in my independent research career. Besides the tool itself, as an ellipsometry expert, Film Sense has been very responsive to our data analysis/fit inquiries and saved us valuable research time by sharing his expertise. We are looking forward to getting their latest generation system with additional features that we can integrate for good on either of the reactors. Right now, our single FS-1 tool is going back-and-forth between thermal and plasma reactor based on our needs."

——Necmi Biyikli, Assistant Professor,
Electrical and Computer Engineering, University of Connecticut

“總結我們(men) 對FS-1工具近5年的擁有經驗，我隻能說，它可能是迄今為(wei) 止我在獨立研究職業(ye) 生涯中獲得的性能/成本蕞高的工具。除了工具本身，作為(wei) 一個(ge) 橢偏儀(yi) 專(zhuan) 家，Film Sense已經非常響應我們(men) 的數據分析/合適的詢問，並通過分享他的專(zhuan) 業(ye) 知識節省了我們(men) 寶貴的研究時間。我們(men) 期待著得到他們(men) 蕞新的係統，附加的功能，我們(men) 可以在任何一個(ge) 反應堆上永久集成。現在，我們(men) 單一的FS-1工具正在根據我們(men) 的需要在熱反應堆和等離子反應堆之間來回切換。”
—— Necmi Biyikli助理教授     電子與(yu) 計算機工程，康涅狄格大學

"The system (FS-XY150) is great and we are having an increase of users using it. I am happy with the system and I direct users to use it when I am training them on our ALD deposition system. It gives great results and the customer support is quick and helpful too."

——Tony Whipple, Scientist   Minnesota Nano Center

“這個(ge) 係統(FS-XY150)很棒，越來越多的用戶在使用它。我對係統很滿意，我指導用戶使用它時，我正在培訓他們(men) 對我們(men) 的ALD沉積係統。它能帶來很好的結果，客戶支持也很快很有幫助。”
——托尼·惠普爾，科學家   明尼蘇達納米中心