橢偏儀在位表征電化學沉積的係統搭建（二十）- 長方形流動微腔

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（二十）- 長方形流動微腔

3.3.2長方形流動微腔

為(wei) 了解決(jue) 溶液微圓形腔體(ti) 溶液注入困難、溶液少及反應產(chan) 生氣泡的問題，進一步對腔體(ti) 進行改進，得到微流腔體(ti) 。圖3-18是微流腔體(ti) 製作過程示意圖，首先準備好ITO、EVA膠膜、特氟龍細管、Au/Si，把EVA膠膜切成內(nei) 為(wei) 25px×62.5px，外為(wei) 37.5px×75px的長方形，然後從(cong) 上到下依次把ITO、EVA膠膜/特氟龍細管、Au/Si疊好置於(yu) 加熱平台，在150℃下加熱，使得EVA軟化粘合池體(ti) ，zui後冷卻得到成品。

該池體(ti) 工作電極即為(wei) Au/Si基底，上端的ITO即為(wei) 對電極，溶液的進出由兩(liang) 邊的特氟龍細管實現，通常製作完成後的微腔厚度和特氟龍細管一致，約為(wei) 1mm。該微腔具有液層薄、溶化充足且流動可以消除ITO上產(chan) 生的氣泡等優(you) 點。

圖31-18流動型微腔示意圖

用該池體(ti) 對不同濃度醋酸鉛溶液進行測試，得到的結果如圖3-19所示。可以看到有無溶液加入，測試得到的橢偏參數峰位及數值上都存在差別。但是在加不同濃度的溶液(去離子水、1M醋酸鈉、1M的醋酸鈉和5/10/15/20mM的醋酸鉛)後得到的橢偏參數數值和趨勢都一致。這和前麵所述的半圓弧型電解池在不同濃度的醋酸鉛溶液中橢偏測試結果一致，同樣說明在醋酸鉛溶液中，其濃度橢偏測試參數的影響可忽略不計。

圖3-19不同條件下EVA腔體(ti) 橢偏測試結果(a)Psi；(b)Delta

如圖3-20所示，是用該池體(ti) 進行沉積薄膜的結果。電解液為(wei) 0.02MCu(CH₃COO)_2，0.1MCH₃COONa，Au/Si為(wei) 工作電極，ITO為(wei) 對電極，-0.4mA恒壓沉積。對比沉積前後腔體(ti) 圖可知，用該池體(ti) 可以進行沉積。與(yu) 前圓環電極對比可以看到，ITO上不再有氣泡存在，因為(wei) 產(chan) 生的氣泡都被流動的溶液帶走了。因溶液可以流動，故可克服圓環電極溶液少的缺點。所以後續沉積薄膜實驗的橢偏儀(yi) 監測選用該流動池體(ti) 進行。

圖3-20流動型微腔(a)沉積前(b)沉積後實物圖

3.4小結

本文主要介紹了研究中實驗裝置的設計及測試的過程，主要包含半圓弧型器件微元腔體(ti) 器件。首先設計完成半圓弧器件，實現了把沉積過程和橢偏儀(yi) 測試相結合，觀察窗口選用石英玻璃，理論上zui大限度減小了光的損耗。但是它的池體(ti) 設計太大使得溶液浪費且測試過程中基底的更換、池體(ti) 的密封困難。然後完成圓環型微元腔體(ti) 的設計及製作，其足夠小的腔體(ti) 減小了溶液對橢偏測試帶來的影響。但是容納的溶液會(hui) 帶來沉積離子不夠的問題且經過實驗發現對電極ITO上會(hui) 出現氣泡，影響橢偏測試，所以在此基礎上設計製作完成了長方形微流腔體(ti) 。該設計成功解決(jue) 了氣泡和溶液少所帶來的問題，故而後續實驗將采用長方形微流腔體(ti) 。

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