橢偏儀在位表征電化學沉積的係統搭建（二十七）- 介電常數的演變

正文

橢偏儀(yi) 在位表征電化學沉積的係統搭建（二十七）- 介電常數的演變

1、短波範圍(300-500 nm)

圖4-11是經過擬合得到的在短波段的n、k及和。從(cong) 圖中可以看到不同沉積時間下得到的曲線隨波長的變化大致趨勢一致，但在細節方麵及數值上會(hui) 有變化且和0s有較差別。n、k值的變化前麵有敘述，這裏更加明顯的看到了360s時得到的各個(ge) 值和其他時間的差別，說明該時間下沉積得到的薄膜比較特殊，如前所述有待進一步驗證。從(cong) 圖4-11(c)圖來看整體(ti) 上有無沉積對比較明顯，0s時從(cong) 正值一致減小到負值，這同樣反映的是金屬Au的特性。其餘(yu) 時間180s的zui大，360s的zui小且在300nm處的值小於(yu) 0，其它時間值比較接近。對比0s在320nm附近出現新的波包。從(cong) 圖4-11(d)圖來看在0s時數值都比有沉積的大，且在400-500nm段變化趨勢不同，0s為(wei) 增加趨勢其他時間為(wei) 減小趨勢。0s時在370nm附近出現波包，其他沉積時間在310nm和400nm附近出現波包。認為(wei) 310nm附近的波包是新出現的，而400nm附近的波包源於(yu) 0s時的370nm處的波包隻是它發生了紅移。對不同沉積時間相互對比，180s的變化值比較小，且看起來和其他時間有差異，這可能是由於(yu) 沉積薄膜厚度引起。時間增加到360s以後，的變化趨勢基本一致，隻是360s比其他時間的小，且隨著波長的增加其差別也變大。

圖4-11擬合得到的不同沉積時間薄膜的300-500nm波段的(a)n、(b)k及介電常數(c)實部和(d)虛部

2、長波範圍(500-800nm)

圖4-12是模擬得到的各個(ge) 沉積時間的介電常數實部和虛部相對於(yu) 1s的變化Δ和Δ以及相對於(yu) 180s的變化率。圖4-12(a)在300-600nm波段Δ為(wei) ，600-800nm波段Δ為(wei) 正值，整體(ti) 的變化趨勢。從(cong) 圖4-12(b)來看Δ除了360s，其餘(yu) 的在470nm-600nm附近是負值，其餘(yu) 是正值。360s在300nm-420nm波段為(wei) 正值，其餘(yu) 波段負值4-12(c)顯示Δ/的變化規律和Δ的比較相似，但是放大了600-800nm波段的變化。從(cong) 4-12(d)來看Δ/的變化規律和Δ相似，但是同樣在600-800nm波段其變比Δ的要大。

Δ、Δ在圖中出現的躍遷可能是沉積基底表麵的幹涉現象的要進驗另外Δ/和Δ/圖線的長波段的雜亂(luan) 同樣表明在長波段(500-800nm)該測試係統對薄膜的表征不理想，後續研究可盡量在小於(yu) 500nm的波段進行。

圖4-12相對於(yu) 180s沉積的變化(a)；(b)；(c)/;(d)/

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參考文獻

[1] WONG H S P, FRANK D J, SOLOMON P M et al. Nanoscale cmos[J]. Proceedings of the IEEE, 1999, 87(4): 537-570.

[2] LOSURDO M, HINGERL K. ellipsometry at the nanoscale[M]. Springer Heidelberg New York Dordrecht London. 2013.

[3] DYRE J C. Universal low-temperature ac conductivity of macroscopically disordered nonmetals[J]. Physical Review B, 1993, 48(17): 12511-12526. DOI:10.1103/PhysRevB.48.12511.

[4] CHEN S, KÜHNE P, STANISHEV V et al. On the anomalous optical conductivity dISPersion of electrically conducting polymers: Ultra-wide spectral range ellipsometry combined with a Drude-Lorentz model[J]. Journal of Materials Chemistry C, 2019, 7(15): 4350-4362.

[5] 陳籃，周岩. 膜厚度測量的橢偏儀(yi) 法原理分析[J]. 大學物理實驗, 1999, 12(3): 10-13.

[6] ZAPIEN J A, COLLINS R W, MESSIER R. Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV[J]. Review of Scientific Instruments, 2000, 71(9): 3451-3460.

[7] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[8] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[9] YUAN M, YUAN L, HU Z et al. In Situ Spectroscopic Ellipsometry for Thermochromic CsPbI3 Phase Evolution Portfolio[J]. Journal of Physical Chemistry C, 2020, 124(14): 8008-8014.

[10] 焦楊景.橢偏儀(yi) 在位表征電化學沉積的係統搭建.雲(yun) 南大學說是論文,2022.

[11] CANEPA M, MAIDECCHI G, TOCCAFONDI C et al. Spectroscopic ellipsometry of self assembLED monolayers: Interface effects. the case of phenyl selenide SAMs on gold[J]. Physical Chemistry Chemical Physics, 2013, 15(27): 11559-11565. DOI:10.1039/c3cp51304a.

[12] FUJIWARA H, KONDO M, MATSUDA A. Interface-layer formation in microcrystalline Si:H growth on ZnO substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Journal of Applied Physics, 2003, 93(5): 2400-2409.

[13] FUJIWARA H, TOYOSHIMA Y, KONDO M et al. Interface-layer formation mechanism in (formula presented) thin-film growth studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Physical Review B - Condensed Matter and Materials Physics, 1999, 60(19): 13598-13604.

[14] LEE W K, KO J S. Kinetic model for the simulation of hen egg white lysozyme adsorption at solid/water interface[J]. Korean Journal of Chemical Engineering, 2003, 20(3): 549-553.

[15] STAMATAKI K, PAPADAKIS V, EVEREST M A et al. Monitoring adsorption and sedimentation using evanescent-wave cavity ringdown ellipsometry[J]. Applied Optics, 2013, 52(5): 1086-1093.

[16] VIEGAS D, FERNANDES E, QUEIRÓS R et al. Adapting Bobbert-Vlieger model to spectroscopic ellipsometry of gold nanoparticles with bio-organic shells[J]. Biomedical Optics Express, 2017, 8(8): 3538.

[17] ARWIN H. Application of ellipsometry techniques to biological materials[J]. Thin Solid Films, 2011, 519(9): 2589-2592.

[18] ZIMMER A, VEYS-RENAUX D, BROCH L et al. In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy [J]. Journal of Vacuum Science & Technology B, 2019, 37(6): 062911.

[19] ZANGOOIE S, BJORKLUND R, ARWIN H. Water Interaction with Thermally Oxidized Porous Silicon Layers[J]. Journal of The Electrochemical Society, 1997, 144(11): 4027-4035.

[20] KYUNG Y B, LEE S, OH H et al. Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry[J]. Bulletin of the Korean Chemical Society, 2005, 26(6): 947-951.

[21] OGIEGLO W, VAN DER WERF H, TEMPELMAN K et al. Erratum to ― n-Hexane induced swelling of thin PDMS films under non-equilibrium nanofiltration permeation conditions, resolved by spectroscopic ellipsometry‖ [J. Membr. Sci. 431 (2013), 233-243][J]. Journal of Membrane Science, 2013, 437: 312..

[22] BROCH L, JOHANN L, STEIN N et al. Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments[J]. Review of Scientific Instruments, 2007, 78(6).

[23] BISIO F, PRATO M, BARBORINI E et al. Interaction of alkanethiols with nanoporous cluster-assembled Au films[J]. Langmuir, 2011, 27(13): 8371-8376.

[24] 李廣立. 氧化亞(ya) 銅薄膜的製備及其光電性能研究[D]. 西南交通大學, 2016.

[25] 董金礦. 氧化亞(ya) 銅薄膜的製備及其光催化性能的研究[D]. 安徽建築大學, 2014.

[26] 張楨. 氧化亞(ya) 銅薄膜的電化學製備及其光催化和光電性能的研究[D]. 上海交通大學材料科 學與(yu) 工程學院, 2013.

[27] DISSERTATION M. Cellulose Derivative and Lanthanide Complex Thin Film Cellulose Derivative and Lanthanide Complex Thin Film[J]. 2017.

[28] NIE J, YU X, HU D et al. Preparation and Properties of Cu2O/TiO2 heterojunction Nanocomposite for Rhodamine B Degradation under visible light[J]. ChemistrySelect, 2020, 5(27): 8118-8128.

[29] STRASSER P, GLIECH M, KUEHL S et al. Electrochemical processes on solid shaped nanoparticles with defined facets[J]. Chemical Society Reviews, 2018, 47(3): 715-735.

[30] XU Z, CHEN Y, ZHANG Z et al. Progress of research on underpotential deposition——I. Theory of underpotential deposition[J]. Wuli Huaxue Xuebao/ Acta Physico - Chimica Sinica, 2015, 31(7): 1219-1230.

[31] PANGAROV n. Thermodynamics of electrochemical phase formation and underpotential metal deposition[J]. Electrochimica Acta, 1983, 28(6): 763-775.

[32] KAYASTH S. ELECTRODEPOSITION STUDIES OF RARE EARTHS[J]. Methods in Geochemistry and Geophysics, 1972, 6(C): 5-13.

[33] KONDO T, TAKAKUSAGI S, UOSAKI K. Stability of underpotentially deposited Ag layers on a Au(1 1 1) surface studied by surface X-ray scattering[J]. Electrochemistry Communications, 2009, 11(4): 804-807.

[34] GASPAROTTO L H S, BORISENKO N, BOCCHI N et al. In situ STM investigation of the lithium underpotential deposition on Au(111) in the air- and water-stable ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide[J]. Physical Chemistry Chemical Physics, 2009, 11(47): 11140-11145.

[35] SARABIA F J, CLIMENT V, FELIU J M. Underpotential deposition of Nickel on platinum single crystal electrodes[J]. Journal of Electroanalytical Chemistry, 2018, 819(V): 391-400.

[36] BARD A J, FAULKNER L R, SWAIN E et al. Fundamentals and Applications[M]. John Wiley & Sons, Inc, 2001.

[37] SCHWEINER F, MAIN J, FELDMAIER M et al. Impact of the valence band structure of Cu2O on excitonic spectra[J]. Physical Review B, 2016, 93(19): 1-16.

 [38] XIONG L, HUANG S, YANG X et al. P-Type and n-type Cu2O semiconductor thin films: Controllable preparation by simple solvothermal method and photoelectrochemical properties[J]. Electrochimica Acta, 2011, 56(6): 2735-2739.

[39] KAZIMIERCZUK T, FRÖHLICH D, SCHEEL S et al. Giant Rydberg excitons in the copper oxide Cu2O[J]. Nature, 2014, 514(7522): 343-347.

[40] RAEBIGER H, LANY S, ZUNGER A. Origins of the p-type nature and cation deficiency in Cu2 O and related materials[J]. Physical Review B - Condensed Matter and Materials Physics, 2007, 76(4): 1-5.

[41] 舒雲(yun) . Cu2O薄膜的電化學製備及其光電化學性能的研究[D]. 雲(yun) 南大學物理與(yu) 天文學院，2019.